MEMS2015

In dem Forschungsprojekt „Schaltplan-basierter Entwurf von MEMS für Anwendungen in Optik und Robotik“ – kurz MEMS2015 erkunden Experten aus Forschungseinrichtungen und Industrie völlig neue Methoden für die MEMS-Entwicklung. Ziel ist es, erstmalig eine universelle Entwurfsmethodik für Mikro-Elektromechanischen-Systemen (MEMS) zu entwickeln, die die Lücken zwischen Elektronik- und Mechanik-Design, der Fertigung sowie der anschließenden Integration in Produkte schließt und damit auch damit das MEMS-Marktpotenzial um bis zu 50 Prozent steigert.

Mit den neuen Methoden lassen sich neuartige Sensor- und Aktorsysteme in den Leitanwendungen Optik und Robotik entwickeln – damit können zum Beispiel Roboter künftig besser sehen und tasten. So sind weitreichende Anwendungen von Mikrospiegel-Arrays – die bereits heute in Projektoren eingesetzt werden – denkbar, die einmal Bilder z. B. über eine Art Brille direkt auf die Netzhaut projizieren. In der Robotik können Kraftfühler und Profilometer entwickelt werden, die Oberflächen noch genauer als bisher analysieren bzw. einen äußerst genauen Tastsinn nachbilden. Die Ergebnisse des Projekts werden im Rahmen des Vorhabens anhand realer MEMS-Prototypen überprüft, die dadurch auch als Demonstratoren fungieren.

Mit den Projektergebnissen werden die Möglichkeiten einer breiten MEMS-Anwendung im professionellen und sicherheitsrelevanten Umfeld enorm erweitert. Zudem können kleine und mittelgroße Unternehmen (KMUs) dank der neuen Methoden in Zukunft auch MEMS entwerfen und viel häufiger und in größerer Vielfalt als heute in ihre Produkte integrieren.

, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html, basic_html