Authors: Ralf Sommer, IMMS - Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, DE; Jenny Klaus, IMMS - Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, DE; Roman Paris
Abstract:
http://ieeexplore.ieee.org/document/7520730/
“Systematic MEMS ASIC design flow using the example of an acceleration sensor”, , Juni 2016
Abstract:
With the help of MEMS-ASIC-development methodology the gap between a seamless design of multiphysical systems can be overcome. This contribution gives insight to MEMS2015 results of methodology for synthesis of MEMS. As an example of heterogeneous design an acceleration sensor is presented.
Publication Date: 2016/06/27
Location of Publication: Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2016 13th International Conference on
Keywords: Analogue/Mixed Signal Design; MEMS Design
